Design and reconditioning of ferrofluidic seals, vacuum rotary feedthrough. Ferrofluidic seals for ion implanter, vertical diffusion furnaces, CVD, etc.. Design of ferrofluidic seals according to your specifications (Pressure / Vacuum / Aggressive environment / speed ...). Repair Service, static and dynamic test bench.
Engineering. High Vacuum and UHV chambers. Beamlines. Manual & Automatic loading of substrates. Rotary vacuum feedthroughs. Wafer Chuck and Pedestal Assemblies, heater resistor or halogen lamps. Wafer chuck cooled by liquid nitrogen or cryogenic system. Helium Leak Test.
Services of XITECH
High Temperature removable Platen.
Design and reconditioning of industrial gas distribution systems. Design of gas-box for ion implanters or other equipment from Micro-electronics. Adaptation according to your needs: Additional gas lines or liquid source. Modification for adaptation of different bottle sizes or more bottles. Repair Service: Bench test / Helium Leak Detector.
INNOVATION & SERVICES
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Magnetic Seals
ION IMPLANTATION REPAIR Vacuum rotary feedthroughs
DIFF & CVD REPAIR Vacuum rotary feedthroughs
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ENGINEERING
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Security System for PRAXAIR & MATHESON Gas Cylinder
Ion Implanter Gas-boxes
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REFERENCES
SHOP EBAY AXCELIS Parts VARIAN Parts
E500 Roplat Main Shaft
TOKYO ELECTRON Parts
Vertical Furnace Magnetic Seal
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